Patent Assignment
Reel/Frame 015440/0550
Assignment of Assignor's Interest
Recorded: 2004-06-08
Pages: 4
Assignors
OTTENS, JOOST JEROEN
Executed: 2004-06-03
VAN DER SCHOOT, HARMEN KLAAS
Executed: 2004-06-03
STARREVELD, JEROEN PIETER
Executed: 2004-06-01
MAAS, WOUTERUS JOHANNES PETRUS MARIA
Executed: 2004-06-01
VENEMA, WILLEM JURRIANUS
Executed: 2004-06-03
MENCHTCHIKOV, BORIS
Executed: 2004-06-03
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Optimized Correction of Wafer Thermal Deformations in a Lithographic Process