Patent Assignment
Reel/Frame 015518/0166
Assignment of Assignor's Interest
Recorded: 2004-06-28
Pages: 3
Assignors
MITSUHASHI, KOUJI
Executed: 2003-11-19
NAKAYAMA, HIROYUKI
Executed: 2003-11-19
NAGAYAMA, NOBUYUKI
Executed: 2003-11-19
MORIYA, TSUYOSHI
Executed: 2003-11-19
NAGAIKE, HIROSHI
Executed: 2003-11-19
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Internal Member of a Plasma Processing Vessel