Patent Assignment
Reel/Frame 015531/0197
Assignment of Assignor's Interest
Recorded: 2004-02-18
Received: 2004-07-08
Pages: 2
Assignee
MATTSON THERMAL PRODUCTS GMBH
DAIMLERSTRASSE 10, DORNSTADT, DEX, D-89160, GERMANY
Covered Property
(1)
Method for Thermally Treating a Substrate That Comprises Several Layers
Application:
10/487,573 →