Patent Assignment
Reel/Frame 015533/0816
Assignment of Assignor's Interest
Recorded: 2005-01-07
Pages: 5
Assignors
WU, ZHEN-CHENG
Executed: 2004-12-23
CHANG, CHENG-HUNG
Executed: 2004-12-23
HUANG, YU-LIEN
Executed: 2004-12-23
CHENG, SHWANG-MING
Executed: 2004-12-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, TAIWAN
Covered Property
(1)
Decreasing Metal-Silicide Oxidation During Wafer Queue Time