Patent Assignment
Reel/Frame 015738/0701
Assignment of Assignor's Interest
Recorded: 2004-08-30
Pages: 3
Assignors
WANG, XINMING
Executed: 2004-06-21
TAKAGI, DAISUKE
Executed: 2004-06-21
TASHIRO, AKIHIKO
Executed: 2004-06-21
FUKUNAGA, AKIRA
Executed: 2004-06-21
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Method