Patent Assignment
Reel/Frame 015821/0943
Assignment of Assignor's Interest
Recorded: 2004-09-24
Pages: 3
Assignor
KAMADA, HIROYUKI
Executed: 2004-08-25
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA, 571-8501, JAPAN
Covered Property
(1)
Semiconductor Device Fabrication Method and Semiconductor Device Fabrication System for Minimizing Film-Thickness Variations
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.