Patent Assignment
Reel/Frame 015903/0161
Assignment of Assignor's Interest
Recorded: 2004-10-18
Pages: 3
Assignor
SENZAKI, YOSHIHIDE
Executed: 2004-09-30
Assignee
AVIZA TECHNOLOGY, INC.
440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CALIFORNIA, 95066
Covered Property
(1)
Multilayer high k dielectric films and method of making the same
Application:
10/766,148 →
Publication:
US 2005/0023628