Patent Assignment
Reel/Frame 015911/0929
Assignment of Assignor's Interest
Recorded: 2004-10-16
Pages: 3
Assignors
HOWALD, ARTHUR M.
Executed: 2002-11-21
KUTHI, ANDRAS
Executed: 2002-12-02
BAILEY III, ANDREW D.
Executed: 2002-11-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Apparatus and Methods for Improving the Stability of Rf Power Delivery to a Plasma Load