Patent Assignment
Reel/Frame 015928/0162
Assignment of Assignor's Interest
Recorded: 2004-10-28
Received: 2004-11-01
Pages: 2
Assignee
INFINEON TECHNOLOGIES AG
ST. -MARTIN-STRASSE 53, MUENCHEN, DEX, 81669, GERMANY
Covered Properties
(2)
Sputtering apparatus
Application:
10/971,112 →
Process for the Abrasive Machining of Surfaces, in Particular of Semiconductor Wafers
Application:
10/186,971 →