Patent Assignment
Reel/Frame 015935/0776
Assignment of Assignor's Interest
Recorded: 2004-10-27
Pages: 5
Assignee
ASMI HOLDING N. V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Lithography Tool Having a Vacuum Reticle Library Coupled to a Vacuum Chamber