Patent Assignment
Reel/Frame 016094/0711
Assignment of Assignor's Interest
Recorded: 2004-11-23
Pages: 2
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Stray Light Feedback for Dose Control in Semiconductor Lithography Systems
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.