Patent Assignment
Reel/Frame 016099/0344
Assignment of Assignor's Interest
Recorded: 2005-04-19
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8485, JAPAN
Covered Property
(1)
Apparatus and Method for Use of Optical System with a Plasma Processing System