Patent Assignment
Reel/Frame 016156/0140
Assignment of Assignor's Interest
Recorded: 2005-01-05
Pages: 3
Assignor
OIKAWA, KOTA
Executed: 2004-11-18
Assignee
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
1006, OAZA KADOMA, KADOMA-SHI, OSAKA 571-8501, JAPAN
Covered Property
(1)
Dry Etching Apparatus and Dry Etching Method
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.