Patent Assignment
Reel/Frame 016196/0176
Change of Name
Recorded: 2005-06-28
Pages: 5
Assignor
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES
Executed: 2002-10-28
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STR.22, OBERKOCHEN, D-73447, GERMANY
Covered Property
(1)
Method for Optimising the Image Properties of at Least Two Optical Elements as Well as Methods for Optimising the Image Properties of at Least Three Optical Elements
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.