Patent Assignment
Reel/Frame 016213/0338
Assignment of Assignor's Interest
Recorded: 2005-01-31
Pages: 2
Assignors
SCHRIEVER, MARTIN
Executed: 2005-01-18
WEGMANN, ULRICH
Executed: 2005-01-09
HAIDNER, HELMUT
Executed: 2005-01-19
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY
Covered Property
(1)
Interferometric Measuring Device and Projection Exposure Installation Comprising Such Measuring Device