Patent Assignment
Reel/Frame 016251/0823
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded: 2005-02-03
Received: 2005-02-16
Pages: 2
Assignors
BAER, WERNER
Executed: 2005-01-28
BECKER, KLAUS
Executed: 2005-01-28
PETRY, KLAUS
Executed: 2005-02-02
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES
Covered Application
(1)
ION SOURCE FOR USE IN AN ION IMPLANTER
App. No. 11/049,913
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