Patent Assignment
Reel/Frame 016286/0441
Assignment of Assignor's Interest
Recorded: 2005-02-17
Pages: 3
Assignors
SHINRIKI, HIROSHI
Executed: 2004-12-21
DOBASHI, KAZUYA
Executed: 2004-12-21
SUZUKI, MIKIO
Executed: 2004-12-21
MAGARA, TAKASHI
Executed: 2004-12-21
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of Cleaning Substrate-Processing Device and Substrate-Processing Device