Patent Assignment
Reel/Frame 016301/0576
Assignment of Assignor's Interest
Recorded: 2004-08-09
Received: 2005-03-02
Pages: 3
Assignor
CARL ZEISS SMT AG
Executed: 2004-07-05
Assignee
CARL ZEISS SMT AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, DEX, D-73447, GERMANY
Covered Property
(1)
Precision Positioning Apparatus for Positioning a Component Especially an Optical Component
Application:
09/866,089 →