Patent Assignment
Reel/Frame 016337/0922
Assignment of Assignor's Interest
Recorded: 2005-03-02
Pages: 5
Assignors
VAN HERPEN, MAARTEN MARINUS JOHANNES
Executed: 2005-01-24
BANINE, VADIM YEVGENYEVICH
Executed: 2005-02-02
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2005-02-02
SPEE, CAROLUS IDA MARIA ANTONIUS
Executed: 2005-02-03
KLUNDER, DERK JAN WILFRED
Executed: 2005-01-24
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Method for the Removal of Deposition on an Optical Element, Method for the Protection of an Optical Element, Device Manufacturing Method, Apparatus Including an Optical Element, and Lithographic Apparatus