Patent Assignment
Reel/Frame 016533/0619
Assignment of Assignor's Interest
Recorded: 2005-09-14
Pages: 2
Assignor
ROUX, STEPHEN
Executed: 2003-12-22
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS ANTILLES
Covered Property
(1)
Method for Recycling Gases Used in a Lithography Tool