Assignment of Assignor's Interest

Recorded: 2005-07-28 Pages: 6

Assignors

DAS, PALASH P.

Executed: 2005-07-07

HOFMANN, THOMAS

Executed: 2005-06-15

DAVIS, JESSE D.

Executed: 2005-06-14

SMITH, SCOT T.

Executed: 2005-06-10

PARTLO, WILLIAM N.

Executed: 2005-06-10

Assignee

CYMER, INC.

LEGAL DEPT., MS/4-2C, 17075 THORNMINT CT., SAN DIEGO, CALIFORNIA, 92127

Covered Property (1)

Systems and methods for implementing an interaction between a laser shaped as a line beam and a film deposited on a substrate

Application: 11/138,001 →

Publication: US 2005/0259709