Assignment of Assignor's Interest

Recorded: 2005-06-29 Received: 2005-07-07 Pages: 3

Assignors

BERRIAN, DONALD W.

Executed: 2005-06-24

POLLACK, JOHN D.

Executed: 2005-06-24

VANDERPOT, JOHN W.

Executed: 2005-06-24

Assignee

AXCELIS TECHNOLOGIES, INC.

108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES

Covered Property (1)

Method for Reciprocating a Workpiece Through an Ion Beam

Application: 11/099,062 →