Patent Assignment
Reel/Frame 016817/0620
Assignment of Assignor's Interest
Recorded: 2004-12-06
Pages: 2
Assignors
INENAGA, MASAMICHI
Executed: 2004-11-18
KATSUDA, SHINICHI
Executed: 2004-11-18
ARINAGA, YUJI
Executed: 2004-11-18
Assignee
KABUSHIKI KAISHA YASKAWA DENKI
2-1, KUROSAKI-SHIROISHI, YAHATANISHI-KU, KITAKYUSHU-SHI, FUKUOKA 806-0004, JAPAN
Covered Property
(1)
Wafer Pre-Alignment Apparatus and Method