Patent Assignment
Reel/Frame 016866/0091
Assignment of Assignor's Interest
Recorded: 2005-10-10
Pages: 7
Assignors
LI, KUN
Executed: 2005-06-10
ERICKSON, MARK A.
Executed: 2005-06-21
KANELLAKOPOULOS, IOANNIS
Executed: 2005-06-13
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Method and System for Dynamic Modeling and Recipe Optimization of Semiconductor Etch Processes