Patent Assignment
Reel/Frame 016977/0407
Assignment of Assignor's Interest
Recorded: 2005-09-13
Received: 2005-09-16
Pages: 3
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KRX, 442-742, KOREA, REPUBLIC OF
Covered Property
(1)
System and method for pre-gate cleaning of substrates
Application:
11/176,406 →