Patent Assignment
Reel/Frame 016977/0601
Assignment of Assignor's Interest
Recorded: 2005-09-09
Pages: 3
Assignors
IKEDA, TARO
Executed: 2005-08-01
TANAKA, SUMI
Executed: 2005-08-01
YAMAMOTO, KAORU
Executed: 2005-08-01
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
Covered Property
(1)
Substrate Supporting Structure for Semiconductor Processing, and Plasma Processing Device