Patent Assignment
Reel/Frame 017065/0221
Assignment of Assignor's Interest
Recorded: 2006-01-26
Received: 2006-01-26
Pages: 7
Assignor
AKRION, INC.
Executed: 2005-01-25
Assignee
AKRION TECHNOLOGIES, INC.
1105 N. MARKET ST., SUITE 1300, WILMINGTON, DE, 19899, UNITED STATES
Covered Properties
(2)
Method of Processing Substrates Using Pressurized Mist Generation
Application:
10/304,583 →
Low Profile Wafer Carrier
Application:
10/053,449 →