Patent Assignment
Reel/Frame 017082/0170
Assignment of Assignor's Interest
Recorded: 2005-12-01
Received: 2005-12-01
Pages: 4
Assignors
DYSARD, JEFFREY M.
Executed: 2005-09-28
JOHNS, TIMOTHY
Executed: 2005-09-28
FEENEY, PAUL M.
Executed: 2005-11-15
Assignee
CABOT MICROELECTRONICS CORPORATION
870 NORTH COMMONS DRIVE, AURORA, IL, 60504, UNITED STATES
Covered Property
(1)
Method for controlling polysilicon removal
Application:
11/243,140 →