Patent Assignment
Reel/Frame 017143/0063
Assignment of Assignor's Interest
Recorded: 2005-10-26
Pages: 2
Assignors
NAKANO, ASAO
Executed: 2005-10-11
KINEFUCHI, TAKAO
Executed: 2005-10-03
MOTONO, HIROSHI
Executed: 2005-10-03
KIKU, ATSUNORI
Executed: 2005-10-03
Assignee
RIGAKU CORPORATION
3-9-12, MATSUBARA-CHO, AKISHIMA-SHI, TOKYO, 196-8666, JAPAN
Covered Property
(1)
X-Ray Thin Film Inspection Apparatus and Thin Film Inspection Apparatus and Method for Patterned Wafer