Patent Assignment
Reel/Frame 017242/0232
Assignment of Assignor's Interest
Recorded: 2005-11-16
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA, 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method and Apparatus for Determining Chemistry of Part's Residual Contamination