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Patent Assignment
Reel/Frame 017361/0803

ASSIGNMENT OF ASSIGNOR'S INTEREST

Recorded: 2005-12-12 Received: 2005-12-20 Pages: 4
Assignors
FREER, BRIAN S.
Executed: 2005-11-14
PEREL, ALEXANDER S.
Executed: 2005-12-09
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915-1053, UNITED STATES
Covered Application (1)
ION BEAM ANGLE MEASUREMENT SYSTEMS AND METHODS FOR ION IMPLANTATION SYSTEMS
App. No. 11/299,593
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