Patent Assignment
Reel/Frame 017362/0692
Assignment of Assignor's Interest
Recorded: 2006-03-24
Pages: 4
Assignors
KAUSHAL, SANJEEV
Executed: 2006-03-21
SUGISHIMA, KENJI
Executed: 2006-03-21
RAO, DONTHINENI RAMESH KUMAR
Executed: 2006-03-21
Assignee
TOKYO ELECTRON LIMITED
3-6 AKASAKA 5-CHOME, MINATO-KU, TBS BROADCAST CENTER, TOKYO, 107, JAPAN
Covered Property
(1)
Method of Monitoring a Semiconductor Processing System Using a Wireless Sensor Network