Patent Assignment
Reel/Frame 017387/0987
Assignment of Assignor's Interest
Recorded: 2005-12-16
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538-6470
Covered Property
(1)
Apparatus and Method for Controlling Plasma Density Profile
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.