Patent Assignment
Reel/Frame 017423/0185
Assignment of Assignor's Interest
Recorded: 2005-12-27
Received: 2006-01-09
Pages: 3
Assignors
CHOI, SEUNG WOO
Executed: 2005-12-27
LEE, CHUN SOO
Executed: 2005-12-27
PARK, KWANG LAE
Executed: 2005-12-27
Assignee
ASM GENITECH, INC.
1694-5, SINILDONG, DAEDEOGGU, DAEJEON 306-230, KRX, KOREA, REPUBLIC OF
Covered Property
(1)
Atomic layer deposition apparatus
Application:
11/318,786 →