Patent Assignment
Reel/Frame 017450/0454
Assignment of Assignor's Interest
Recorded: 2006-01-05
Received: 2006-01-17
Pages: 3
Assignee
SAMSUNG SDI CO., LTD.
575, SHIN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KRX, KOREA, REPUBLIC OF
Covered Property
(1)
Deposition system and method for measuring deposition thickness in the deposition system
Application:
11/325,310 →