Patent Assignment
Reel/Frame 017467/0481
Assignment of Assignor's Interest
Recorded: 2006-01-17
Pages: 4
Assignors
IWASHITA, JYUN
Executed: 2006-01-06
HIRAYAMA, TAKU
Executed: 2006-01-06
TACHIKAWA, TOSHIKAZU
Executed: 2006-01-06
Assignee
TOKYO OHKA KOGYO CO., LTD.
150 NAKAMARUKO, NAKAHARA-KU, KAWASAKI-SHI, KANAGAWA 211-0012, JAPAN
Covered Property
(1)
Resist material for liquid immersion lithography process and method for forming resist pattern using the resist material
Application:
10/545,915 →
Publication:
US 2006/0110676
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.