Patent Assignment
Reel/Frame 017530/0361
Assignment of Assignor's Interest
Recorded: 2006-02-01
Pages: 3
Assignor
FAGUET, JACQUES
Executed: 2006-01-10
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method and System for Performing Plasma Enhanced Atomic Layer Deposition