Patent Assignment
Reel/Frame 017576/0903
Assignment of Assignor's Interest
Recorded: 2006-02-15
Pages: 2
Assignor
DHINDSA, RAJINDER
Executed: 2006-02-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Processing Reactor with Multiple Capacitive and Inductive Power Sources