Patent Assignment
Reel/Frame 017579/0456
Assignment of Assignor's Interest
Recorded: 2006-02-12
Pages: 2
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JAPAN
Covered Property
(1)
Semiconductor Processing Apparatus with Lift Pin Structure