Patent Assignment
Reel/Frame 017623/0184
Assignment of Assignor's Interest
Recorded: 2006-05-16
Received: 2006-05-16
Pages: 6
Assignors
UNGER, EUGEN
Executed: 2006-05-04
ENGELHARDT, MANFRED
Executed: 2006-05-15
STICH, ANDREAS
Executed: 2006-05-16
Assignee
INFINEON TECHNOLOGIES AG
ST. MARTIN-STR. 53, MUNCHEN, DEX, D-81669, GERMANY
Covered Property
(1)
Method of Forming Self-Aligned Air-Gaps Using Self-Aligned Capping Layer over Interconnect Lines
Application:
11/276,801 →