Patent Assignment
Reel/Frame 017632/0385
Assignment of Assignor's Interest
Recorded: 2006-03-01
Received: 2006-03-08
Pages: 3
Assignee
INNOVATIVE MICRO TECHNOLOGY
75 ROBIN HILL ROAD, GOLETA, CA, 93117, UNITED STATES
Covered Property
(1)
Method and apparatus for curing epoxy-based photoresist using a continuously varying temperature profile
Application:
11/364,334 →