Patent Assignment
Reel/Frame 017648/0908
Assignment of Assignor's Interest
Recorded: 2006-03-07
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Film Formation Method and Apparatus for Semiconductor Process