Patent Assignment
Reel/Frame 017698/0218
Assignment of Assignor's Interest
Recorded: 2006-03-17
Pages: 2
Assignors
MIYAMOTO, ATSUSHI
Executed: 2006-01-18
NAGATOMO, WATARU
Executed: 2006-01-18
MATSUOKA, RYOICHI
Executed: 2006-01-23
MOROKUMA, HIDETOSHI
Executed: 2006-01-23
SUTANI, TAKUMICHI
Executed: 2006-01-23
Assignee
HITACHI, LTD.
24-14, NISHISHINBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Arranging Recipe of Scanning Electron Microscope and Apparatus for Evaluating Shape of Semiconductor Device Pattern
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.