Patent Assignment
Reel/Frame 017701/0153
Assignment of Assignor's Interest
Recorded: 2006-02-28
Pages: 2
Assignors
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2006-02-16
MUSA, SAMI
Executed: 2006-02-16
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Binary Sinusoidal Sub-Wavelength Gratings as Alignment Marks