Patent Assignment
Reel/Frame 017827/0421
Assignment of Assignor's Interest
Recorded: 2006-06-22
Received: 2006-06-22
Pages: 4
Assignor
AKRION, INC.
Executed: 2006-06-21
Assignee
AKRION TECHNOLOGIES, INC.
1101 N. MARKET ST. - SUITE 1300, WILMINGTON, DE, 19899, UNITED STATES
Covered Property
(1)
System and method of processing substrates using a sub-ambient process solution and sonic energy
Application:
60/724,495 →