Patent Assignment
Reel/Frame 017951/0375
Assignment of Assignor's Interest
Recorded: 2006-05-31
Pages: 4
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-SHI, AICHI-KEN 467-8530, JAPAN
Covered Property
(1)
Substrate Processing Device