Assignment of Assignor's Interest

Recorded: 2006-07-21 Pages: 3

Assignors

MANN, HANS-JUERGEN

Executed: 2006-07-10

ULRICH, WILHELM

Executed: 2006-07-11

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, GERMANY

Covered Property (1)

Projection objectives and systems using projection objectives

Application: 60/793,387 →