Patent Assignment
Reel/Frame 018001/0244
Assignment of Assignor's Interest
Recorded: 2006-06-16
Pages: 3
Assignor
YAMASHITA, ASAO
Executed: 2006-04-10
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method for Conditioning a Process Chamber