Patent Assignment
Reel/Frame 018005/0361
Assignment of Assignor's Interest
Recorded: 2006-07-26
Pages: 5
Assignor
APPLIED SCIENCE AND TECHNOLOGY, INC.
Executed: 2005-06-08
Assignee
MKS INSTRUMENTS, INC.
90 INDUSTRIAL WAY, WILMINGTON, MASSACHUSETTS, 01887
Covered Property
(1)
Method and system for producing ozonized deionized water
Application:
11/433,092 →
Publication:
US 2007/0034230
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.