Patent Assignment
Reel/Frame 018008/0260
Assignment of Assignor's Interest
Recorded: 2006-06-19
Pages: 3
Assignor
ISHIZAKA, TADAHIRO
Executed: 2006-04-05
Assignee
TOKYO ELECTRON LIMITED
TBS BROADCAST CENTER, 3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-8481, JAPAN
Covered Property
(1)
Method of Forming a Metal Carbide or Metal Carbonitride Film Having Improved Adhesion